Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : C04
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Host: The Japan Society of Precision Engineering

Development of Electrostatically Actuated Micro-cantilevers for Low Contact-force MEMS Probe Card Utilizing Fritting Contact
*Shingo Kawamura, Kenichi Kataoka, Toshihiro Itoh, Tadatomo Suga
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Keywords: Fritting, Probe Card, MEMS, Micro-Cantilever, Electrostatic Actuator, Ni Electroplating
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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