Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : C06
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Host: The Japan Society of Precision Engineering

Characterizations of Micro Reflecting Mirrors with Restricted Access
Ryutaro Maeda, Takeshi Kobayashi, *Xuechuan Shan
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Keywords: MEMS Application, MEMS Device, Micro Mirrors, Nondestructive Measurement, SFM
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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