High Removal Rate Ultra-Smoothness Poloshing of NiP Plated Aluminum Magnetic Disk Substrate - Experimental Investigation on Change of Removal Rate with Polishing Process -
Published: March 26, 2003Received: November 26, 2002Available on J-STAGE: March 01, 2005Accepted: December 15, 2002
Advance online publication: -
Revised: -