Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : K20
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Host: The Japan Society of Precision Engineering

Study on Detection of Silicon Wafer Surface Defects by Using Infrared Evanescent Light (6th Report) - Internal Defect Detection
*Ryusuke Nakajima, Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya
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Keywords: Nano Defect, Near Field Optics, Evanescent Light, FDTD Method
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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