Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : B14
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Host: The Japan Society of Precision Engineering

Developmemt and Applications of Diamond Array Tool Using Silicon Mold
*Hiroki Hayashi, Noboru Takano, Noboru Morita, Shigeru Yamada, Tatsuo Oyama, Shigeto Takano, Seiji Hirai
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Keywords: Single Crystal Silicon, Anisotropic Etching, Chemical Vapor Deposition, Oxide Layer
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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