Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : N73
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Host: The Japan Society of Precision Engineering

A Study of Positioning Methods of the Moving Mechanism Using Piezo Electric Elements
*Yoichi Yamakawa, Shizuichi Higuchi
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Keywords: Piezo Electric Element, Micro Positioning, PID Control
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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