Proceedings of JSPE Semestrial Meeting
2004 JSPE Autumn Meeting
Session ID : M52
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Host: The Japan Society of Precision Engineering

Precision Measurement of 5 Degree-of-Freedom Motion Errors of an Air-Slide
*Yoshikazu Arai, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Park C. H.
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Keywords: 5 degree-of-freedom, air-slide, straightness error, tilt error, motion error, precision measurement
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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