Proceedings of JSPE Semestrial Meeting
2004 JSPE Autumn Meeting
Session ID : M53
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Host: The Japan Society of Precision Engineering

Measurement Method of Tip-Sample Continuous Interaction by Cantilever Deflection Control of Force Balance Atomic Force Microsopy
*Yoshio Tanaka, Yoshihiko Hirai
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Keywords: Scanning Probe Microscopy, Vibration Control
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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