Proceedings of JSPE Semestrial Meeting
2004 JSPE Autumn Meeting
Session ID : N79
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Host: The Japan Society of Precision Engineering

3-D Profiling of Film-covered Objects using Phase-Shifting Interferometry
Hidemitsu Ogawa, Akihiro Nakanowatari, *Katsuichi Kitagawa, Masashi Sugiyama
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Keywords: interferometry, phase-shifting interferometry, surface profile, film thickness, tranparent film
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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