Proceedings of JSPE Semestrial Meeting
2004 JSPE Autumn Meeting
Session ID : N80
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Host: The Japan Society of Precision Engineering

Evaluation of Phase Detection Algorithms for Wavelength Scanning Interferometry
*Ryohei Hanayama, Kenichi Hibino, Shin'ichi Warisawa, Mamoru Mitsuishi
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Keywords: optical interferometer, wavelength scanning, phase measurement, higher harmonic detection, window function
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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