Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : E06
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Host: The Japan Society of Precision Engineering

A Self-organization Simulation Method in Multi-Products Semiconductor Manufacturing
*Nobutada Fujii, Masaaki Kobayashi, Motohiro Kobayashi, Toshiyuki Makita, Itsuo Hatono, Kanji Ueda
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Keywords: semiconductor manufacturing, self-organization, simulation
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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