Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : E07
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Host: The Japan Society of Precision Engineering

Adaptive Lot Release Using Reinforcement Learning in Semiconductor Manufacturing
*Ryohei Takasu, Nobutada Fujii, Motohiro Kobayashi, Toshiaki Makita, Kanji Ueda
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[in Japanese]

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© 2004 The Japan Society for Precision Engineering
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