Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : G52
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Host: The Japan Society of Precision Engineering

Scanning In Situ Self-Calibration Method
*Yoshikazu Arai, Satoshi Kiyono, Chetwynd Derek G., Wei Gao
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Keywords: metrology, in situ, self calibration, displacement sensor, accuracy, linearity error
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Abstract

[in Japanese]

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© 2004 The Japan Society for Precision Engineering
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