Study on Defect Detection in Thin Film Layer of SOI Wafer by Using Infrared Evanescent Light (2nd Report) -Analysis of Infrared Laser Propagation in SOI Layer-
Published: March 16, 2004Received: November 21, 2003Available on J-STAGE: March 01, 2005Accepted: December 20, 2003
Advance online publication: -
Revised: -