Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : G62
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Host: The Japan Society of Precision Engineering

Atomic Force Microscope with Symmetrical Differential Laser Interferometer (2nd report) Uncertainty estimation in pitch measurements
*Ichiko Misumi, Satoshi Gonda, Qiangxian Huang, Taeho Keem, Tomizo Kurosawa, Kiyoshi Takamasu
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Keywords: nanometrology, differential laser interferometer, uncertainty estimation, AFM
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[in Japanese]

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© 2004 The Japan Society for Precision Engineering
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