Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : G63
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Host: The Japan Society of Precision Engineering

A AFM Probe-Unit for Measurement of High Aspect Ratio Micro-Structured Surfaces
*Jun Aoki, Wei Gao, Satoshi Kiyono, Tamaki Ochi, Takahiro Sugimoto
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Keywords: AFM, high aspect ratio, micro-structured surfaces, nanometrology, linear scale
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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