Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H01
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Host: The Japan Society of Precision Engineering

Three-dimensional detection of position of on-board small projections with diffraction in the shadow region(II)
*Shinji Tokunaga, Kazuhito Yamagishi, Norikane Kanai
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Keywords: three-dimensional, optics, shape, diffraction, interference
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[in Japanese]

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© 2004 The Japan Society for Precision Engineering
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