Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H02
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Host: The Japan Society of Precision Engineering

Study on improvement in sori measurement accuracy of 300mm silicon wafer
*Yukihiro Ito, Wataru Natsu, Masanori Kunieda, Noriyuki Maruya, Nobuaki Iguchi
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Keywords: silicon wafer, sori measurement, three-point-support method, measurement accuracy, deflection
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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