Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H14
Conference information

Host: The Japan Society of Precision Engineering

High-rate Deposition of SiNx Films by Atmospheric Pressure Plasma CVD -Optical Emission Spectroscopy of the Deposition Plasma-
[in Japanese], *[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese]
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Keywords: Atmospheric Pressure Plasma CVD, Optical Emission Spectroscopy, Silicon Nitride
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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