Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H15
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Host: The Japan Society of Precision Engineering

Mechanical properties of diamond like carbon film coated by focused ion beam chemical vapor deposition method
*Takahiro Yagi, Yasuo Kogo, Jun Taniguchi, Iwao Miyamoto, Kiyoshi Shinoda
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Keywords: focused ion beam, diamond like carbon, chemical vapor deposition
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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