Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H80
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Host: The Japan Society of Precision Engineering

Integrated Thin Film Metallic Glass Microprobes
*Taiyo Uejima, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
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Keywords: MEMS, metallic glass, probecard
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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