Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H81
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Host: The Japan Society of Precision Engineering

Characterization of Multi-layer Electroplated Micro-spring Array for MEMS Probe Card
*Kenichi Kataoka, Toshihiro Itoh, Kazuo Inoue, Tadatomo Suga
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Keywords: MEMS probe card, 3-dimensional microfabrication, electrical contact, fritting, IC testing, electroplating
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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