Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : J08
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Host: The Japan Society of Precision Engineering

Development of Motion Error Correction System by Non-contact Ultrasonic Motor
*Hiromi Isobe, Akira Kyusojin
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Keywords: Ultrasonic Motor, Squeeze Effect, Ultrasonic Levitation, Motion Error Correction
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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