2004 JSPE Spring Meeting
Session ID : J07
Conference information
Host: The Japan Society of Precision Engineering
Performance Evaluation of the Micro Ultrasonic Motor Using Bulk Piezoelectric Transducer
*Akira Makino, Takefumi Kanda, Kouichi Suzumori, Tomohisa Ono, Takeshi Morita, Minoru Kurosawa
Author information
Keywords:
piezoelectric actuator,
ultrasonicmotor,
micromotor,
bulk piezoelectric material,
micro machinig
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