Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : J52
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Host: The Japan Society of Precision Engineering

Effect of megasonic vibration on various kinds of coolant
Manabu Iwai, *Takafumi Goutani, Akihiro Yoshida, Tetsutaro Uematsu, Kiyoshi Suzuki
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Keywords: coolant, MHz ultrasonic vibration, Megasonic coolant
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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