Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : B15
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Host: The Japan Society of Precision Engineering

Polishing of Silicon using shell-ceramics slurry
*Hitoshi Nakamura, Katsuo Shoji, Yoshinobu Wakamatsu
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Keywords: shell-ceramics, ceramics, polishing, loose abrasive
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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