Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : B14
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Host: The Japan Society of Precision Engineering

Study on Polishing Characteristics of Pyramidal Structured Polishing Pad for Oxygen Free Copper
*Ryunosuke Sato, Yoshio Ichida, Yoshitaka Morimoto, Takumi Koshimizu
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Keywords: pyramidal structured polishing pad, true polishing pressure, grain cutting edge, oxygen free copper
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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