2004 JSPE Spring Meeting
Session ID : N81
Conference information
Host: The Japan Society of Precision Engineering
Foreign particle removal technology for integrated circuit and liquid crystal display by laser ablation.
*Yoshiki Fujii, Ichirou Ishimaru, Hiromitu Tutui, Ryouji Hyoudou, Toshiki Yasokawa
Author information
Keywords:
laser ablation,
eximer laser,
photonics,
optical application,
foreign particl,
integrated circuit
Details
