Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : N82
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Host: The Japan Society of Precision Engineering

Study on Nanomachining using Optical Radiation Pressure controlled Micro tool (2nd report) -Characteristics of Forced Oscillation Micro tool
*Hideya Notani, Takashi Miyoshi, Yasuhiro Takaya, Taeho Ha
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Keywords: Nano Machining, Laser Trapping
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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