Development of Structure Analysing System by Sectioning wit a Tool Wire

Abstract

In this research, a machine tool with a tool wire has been developed for combined machining. Wire EDM for shape forming and abrasive machining for surface grinding are carried out by using the developed machine tool. Repetitive surfacing leads to 3 dimensional observation of materials distribution of a specimen. In this paper, positioning accuracy of the specimen being observed in scanning electron microscope (SEM) chamber is investigated. Even without attach and remove operation the positioning error gets about several μm in repetitive SEM observation. The process of attach and remove of specimen stage generates positioning error of about dozen μm.