Abstract
Fused silica, due to its excellent corrosion resistance and optical characteristics, is used in semiconductor equipment and chemical analysis parts. In this study, an electroplated diamond tool was developed using Quality Engineering specifically for the purpose of drilling of high aspect ratio micro holes (diameter 0.1mm, depth 2mm, aspect ratio 20) in fused silica. This engineered tool was able to drill 35 high aspect ratio micro holes, mentioned above, unlike commercial tools. In addition further drilling was possible with the tool.
