Study on Grain Cutting Edges Generated by Dressing for Pyramidal Structured Polishing Pad

Abstract

In this study, generating behavior of grain cutting edges by dressing for a pyramidal structured polishing pad has been investigated. A series of dressing tests has been carried out and the variation of cutting–edge shapes has been analyzed continuously. As a result, it has been shown that the dressing using the polishing fluid containing loose abrasives with a diameter of 1μm is effective in order to generate suitable grain cutting edges.