Abstract
The cerium oxide particles of single crystal were obtained only by the combination of precipitation method and hydrothermal treatment at lower temperature than 200-C. The particles showed plate–like shape even in the particle size of about 4 nm. By heating, the particle size was increased from about 4 nm to 60 nm maintaining the plate–like shape with elevating the temperature. These cerium oxide particles were applied as a fine abrasive grain for mirror grinding. We manufactured a grinding pellet, consisted of the plate–like cerium oxide particles, using electrophoretic deposition (EPD) phenomenon. As a result of grinding of quartz–crystal wafer using the ceria EPD pellet, fine mirror surface with roughness less than 1nmRy was realized.
