Abstract
In Four–Body Finishing, an emerging polishing method in which polymer particles, called Carrier Particles, are employed and the edge profile of workpiece can be controlled, polystyrene particles exhibits relatively excellent polishing performance. The polystyrene particles, however, differ from each other in terms of various properties, depending on their process of manufacture, as well as raw materials and chemicals used. In this report, with the purpose for process optimization, several kinds of polystyrene particles are compared based on silicon polishing experiment, and the relation between their polishing performance and properties are examined for appropriate carrier particles selection.
