A developed perfect noncontact type XY table system for ultrafine machining process

Abstract

In order to realize the ultrafine machining process in future manufacturing environment, it is necessary to eliminate the error factor in machining system as much as possible. In this study, a nanometer positioning X–Y table system in a perfect noncontact support and drive condition was newly developed. Basic characteristics of the table system were evaluated and then some ultrafine machining experiments were carried out. Consequently, the usefulness of the table system was confirmed from the results of the performance evaluation.