Abstract
The form of machine part with axis, e.g. gear, has much influence on its performance, therefore strict quality control of machine part with axis is demanded. Atomic force probe measuring machine can achieve more accurate measurement than current coordinate measuring machine. But appropriate measuring method is needed to apply it to the measurement of machine parts, especially machine parts with axis, because their form error must be evaluated in reference to the position of the axis. In this report, precise measuring method of machine parts with axis by an atomic force probe measuring machine is proposed. In addition, influence of error factors of this measurement is investigated.