Abstract
Precision rotary/linear dual–axis positioning systems with nanometric resolution, high–speed and wide moving stroke are also desired in various areas of nanotechnology, such as nano–manipulation of cells, micro–parts, etc. This paper presents prototype rotary/linear dual–axis positioning system in which a rotor (moving body) can be moved along and rotated about the axis (Z) of a ceramic cylinder (driving rod). The stroke of the prototype system along Z–axis, which is limited by the length of the cylinder, is designed to be 10 mm and there is no limitation in the rotary motion. Experimental results indicate that the maximum speeds in the two directions are approximately 2.4mm/sec and 50rpm, respectively.
