Abstract
Planar linear motor is a precision positioning stage, which is different from the usual XY stage and consisted of multiple linear motors arranged orthogonally in the same layer. It is a general way to employ a laser interferometer as the positional sensor of the plane linear motor. Therefore, it is necessary to use an external interferometer and orthogonal gauge in higher accuracy for accuracy evaluation and calibration. In this paper, mixed 2–point method is proposed to let user perform calibration easily and relative high accuracy and the primary measurement result of reflecting mirror profile is reported.
