Abstract

Micromachining progresses rapidly in recent years. In order to meet the demands of miniaturization in electronic and optical applications, micromachining technology which is able to access a variety of materials in a 3 dimensional way is required. In previous research, a micro lathe which is installable and operational inside SEM vacuum chamber has been designed and developed. In this study, we do not control the position of the tool tips of the lathe with the traditional machine coordinate but propose a position control method with the pixel coordinate by images from CCD. Then we consider effects of the visual feedback control.