Abstract
The effect of target with different carbon contents on wear resistance of SiC film deposited by RF magnetoron sputtering is studied.Film hardness decrease to a minimum value for the carbon content of 55 mol% and then increase with further increase in the carbon content of target. X–ray diffraction measurements indicate that the crystal structure of the films is amorphous at all the carbon contents investigate. The friction and wear tests carried out using a pin–on–disk–type test machines showed that the friction coefficient of the films decrease from 0.16 in the using a target with a carbon content of 50 mol% to 0.08 in the case of using a target of 60 mol% ,and that the wear resistance of the films increase with increasing carbon content of the target
