Published: September 15, 2005Received: June 19, 2005Available on J-STAGE: April 18, 2006Accepted: March 31, 2006
Advance online publication: -
Revised: -
New nanoprecision mirror surface grinding is being developed on the basis of IT such as VCAD/VCAM system and processes. In this paper, the VCAM fabrication process examples with ELID and the possibility of MRF are introduced.