Study on Femtosecond Laser Micro Processing

Abstract

The features of femtosecond laser are a ultrashort pulse, a high peak output and multiphoton absorption. It has been known that the laser have no thermal effect on the irradiation zone, and the laser is suitable for microfabrication. Femtosecond laser was irradiated to stacked two glass plates, and the interference pattern related to the gap was processed. In this report, the cause of this phenomenon was investigated, and the possibility of a new processing method was found.