Abstract
The birth of a machining center goes back about half a century ago. Since then, the machining center has made great progress with the development of technology. During that period, the motion accuracy of the high precision machining center has been evaluated. However, especially the high accuracy, such as the optical related parts, the medical related parts and the die and mold, has been called for recently. New high precision machining center, whose characters are the hydraulic guide and the linear motor, has been developed for those demands. This essay describes the measurement of motion accuracy and the result of measurement, such as the straightness of linear axes, 10nm step motion, the circular motion test and the circular motion error.
