Abstract
An ultra miniaturized electrostatic micro–valve with a novel pressure balanced structure was proposed and fabricated for the demands of control devices foro miniaturized air actuators that can work in relatively high pressure pneumatic applications such as factory automations, health and wellness related home appliances. The micro–valve was prepared by using MEMS process technology, which makes On/OFF actuation against the pressure of 0.7Mpa at an applying voltage of 50 V. At the pressure of 0.7Mpa, the volume flow rate of the valve reached to 0.2L/min but its leakage current while valve actuation is only 0.1uA or lower.
