Measuring method of aspheric surface using an interferometer with spherical wavefronts (2nd report)

Abstract

A measurement method of aspherical surface using some spherical wavefronts was proposed. However, it is difficult to analyze interference fringes as non-concentric circles by the method. To analyze an interference fringes as non-concentric circles, an improved method is proposed. In simulation, those interference fringes are analyzed by the improved method. At a result, an accuracy of shape analyzed by the improved method was higher than previous proposed method.