Analysis of the electronic beam exposure mechanism of SOG using Thermal Desorption Spectroscopy

Abstract

It has been said that the reaction of Spin-on Glass(SOG) materials caused by the heat treatment and by electron beam irradiation is almost the same behavior by using of Fourier transform infrared (FT-IR) and X-ray photoelectron spectroscopy(XPS) analysis. But, in this work, it was found that the difference between the reaction of SOG by the heat treatment and by electron beam irradiation with the analysis of the thermal desorption spectrometry(TDS).