Detection accuracy evaluation of the measuring system for nano-particles using standard nano-particle

Abstract

In this study, the measuring system for nano-particles which can measure the particle on Si wafer surface by the sensitivity of a nanometer order using a light-scattering method is developed. Although there is a report which detected the standard nano-particle of 37nm of particle diameter until now, but there is still no report which detected the standard nano-particle less than 30nm of particle diameter. Then, the detection accuracy of the measuring system for nano-particles was evaluated using standard nano-particle of 28nm of particle diameter.