Abstract
A precision sinusoidal grid surface is used as the measurement reference of a surface encoder for nanometrology of multi-axis positions. The profile of the gird surface is a superposition of sinusoidal waves in the X-direction and the Y-direction with spatial wavelengths on the order of 100 micrometers and amplitudes on the order of 100 nanometers. The master grid surface is fabricated on a diamond turning machine equipped with a fast tool servo, but time-consuming for fabricating micro-structures over a large area. Replication from the master surface is then carried out for fast fabrication. UV-casting is chosen as the replication method. Experiments of replication on UV-cure resin are conducted.
