Abstract
The laminated structure of K4Nb6O17 consists of 2nm thickness layers. Our research have allowed the mechanical removal processing of the unit layer with an accuracy of 2nm in depth by using Atomic Force Microscope(AFM), and the result of the research seemed to expand the range of the possibility that K4Nb6O17 is applied to micro electro mechanical systems. The result, however, couldn′t make the mechanism of the mechanical micro removal processing clear. In this paper, we measured and estimated the mechanical property of K4Nb6O17 to reveal the micro removal processing. Both the hardness and Young′s modulus of the material are found out after a micro hardness test carried out. Our estimation indicated that K4Nb6O17 is a ductile material based on the obtained hardness and Young′s modulus values and B.R.Lawn′s report. Also the estimation showed the anisotropy of K4Nb6O17 is determined by calculating the binding forces between the composed atoms. From those results, we got useful data in discussing the mechanism of the mechanical micro removal processing.
