Abstract
In order to observe micro cutting phenomena, the groove cuttings are carried out on phosphor bronze, bakelite and glass surface with cutting depth from sub-micrometer to 5 micrometer by combining the micro X-Y table of 60 micrometer stroke and the vertical fine feed unit attached the trigonal pyramid diamond indenter as cutting edge. The three-dimensional shape of cut groove is measured by the scanning of a diamond stylus over the groove area. The pile up due to plastic deformation is observed on both groove sides and it is varied by the work material and the geometrical state of cutting edge.